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发明名称
摘要
申请公布号
NL6706005(A)
申请公布日期
1968.10.29
申请号
NL19670006005
申请日期
1967.04.28
申请人
发明人
分类号
C23C16/40;H01L21/225;H01L21/316
主分类号
C23C16/40
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