发明名称 Piezoelectric sensor and sensing instrument
摘要 To provide a piezoelectric sensor in which a first electrode for measurement and a second electrode for reference are provided apart from each other on one surface side of a piezoelectric piece and a common electrode is provided on an opposite surface side so as to face the first and second electrodes. A piezoelectric sensor includes: a first electrode for measurement and a second electrode for reference provided apart from each other on one surface side of a piezoelectric piece; a common electrode provided on an opposite surface side of the piezoelectric piece commonly for the first electrode and the second electrode to face the first electrode and the second electrode; and an adsorption layer formed on an area, of the common electrode, to which the first electrode is faced across the piezoelectric piece, to adsorb a substance to be sensed.
申请公布号 US8176773(B2) 申请公布日期 2012.05.15
申请号 US20090454518 申请日期 2009.05.19
申请人 YAMAKAWA JUNICHIRO;AKAIKE KAZUO;MUTOH TAKERU;KUKITA HIROYUKI;NIHON DEMPA KOGYO CO., LTD. 发明人 YAMAKAWA JUNICHIRO;AKAIKE KAZUO;MUTOH TAKERU;KUKITA HIROYUKI
分类号 G01N29/036;H01L41/047 主分类号 G01N29/036
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