发明名称 |
Piezoelectric sensor and sensing instrument |
摘要 |
To provide a piezoelectric sensor in which a first electrode for measurement and a second electrode for reference are provided apart from each other on one surface side of a piezoelectric piece and a common electrode is provided on an opposite surface side so as to face the first and second electrodes. A piezoelectric sensor includes: a first electrode for measurement and a second electrode for reference provided apart from each other on one surface side of a piezoelectric piece; a common electrode provided on an opposite surface side of the piezoelectric piece commonly for the first electrode and the second electrode to face the first electrode and the second electrode; and an adsorption layer formed on an area, of the common electrode, to which the first electrode is faced across the piezoelectric piece, to adsorb a substance to be sensed. |
申请公布号 |
US8176773(B2) |
申请公布日期 |
2012.05.15 |
申请号 |
US20090454518 |
申请日期 |
2009.05.19 |
申请人 |
YAMAKAWA JUNICHIRO;AKAIKE KAZUO;MUTOH TAKERU;KUKITA HIROYUKI;NIHON DEMPA KOGYO CO., LTD. |
发明人 |
YAMAKAWA JUNICHIRO;AKAIKE KAZUO;MUTOH TAKERU;KUKITA HIROYUKI |
分类号 |
G01N29/036;H01L41/047 |
主分类号 |
G01N29/036 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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