发明名称 |
Scanning probe microscope and method of observing sample using the same |
摘要 |
Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
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申请公布号 |
US8181268(B2) |
申请公布日期 |
2012.05.15 |
申请号 |
US20080864196 |
申请日期 |
2008.12.18 |
申请人 |
NAKATA TOSHIHIKO;WATANABE MASAHIRO;INOUE TAKASHI;HIDAKA KISHIO;OKAI MAKOTO;MORITA TOSHIAKI;HIROOKA MOTOYUKI;HITACHI, LTD. |
发明人 |
NAKATA TOSHIHIKO;WATANABE MASAHIRO;INOUE TAKASHI;HIDAKA KISHIO;OKAI MAKOTO;MORITA TOSHIAKI;HIROOKA MOTOYUKI |
分类号 |
G01Q60/06;G01Q60/18;G01Q60/22 |
主分类号 |
G01Q60/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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