METHOD FOR MANUFACTURING INFRARED SENSOR EQUIPPING MICRO REFLECTION MIRRORS

摘要

PURPOSE: A method for manufacturing an infrared sensor having a micro reflection mirror is provided to enhance the sensitivity without waste of infrared ray reaching to unit pixels of each sensor and to separates pixels by coating a reflective film on a micro back mirror. CONSTITUTION: A method for manufacturing an infrared sensor having a micro reflection mirror is as follows. Sensor unit pixels are arrayed on a Si signal acquisition circuit(10) at predetermined intervals, so that an infrared sensor array is manufactured. A polymer(30) is coated on the upper part of the sensor unit pixels and the Si signal acquisition circuit and heat cured. A photo-resistor is coated and a reflection mirror pattern(50) is exposed. A photo-resister formed in the upper part of the micro reflection mirror is eliminated. A metal film is metallized on a pattern surface of the reflection mirror.