| 摘要 |
PURPOSE: A rear electrode solar battery and manufacturing method thereof are provided to successively control the temperature of heat emitted from laser, thereby blocking unnecessary heat transfer to an emitter or a base during a contact hole forming process. CONSTITUTION: Either one of an emitter(110) or a base(120) is formed on the rear side of a silicon wafer(100) using an LCP(Laser Chemical Process). The other one of the emitter or the base is formed on the rear side of the silicon wafer using the LCP. SiO2 oxide films(140a,140b) are formed on the rear side of the silicon wafer. A contact hole(160) is formed on the SiO2 oxide films. A metal electrode is formed in the contact hole. |
