METHOD FOR FABRICATING MICROLENS ARRAY

摘要

PURPOSE: A method for manufacturing a micro-lens array is provided to manufacture a lens of an aspheric shape by mixing dry ion etching and wet etching and controlling processing ration of the dry ion etching and the wet etching. CONSTITUTION: A Cr film(120) and an Al film(130) are sequentially evaporated on a quartz wafer(110) as a predetermined height. Photo-resists(140) are coated on the Cr film and the Al film and are patterned in order to have predetermined hole size. The Cr film and the Al film which are located between patterned photo-resists are patterned by using a dry etching process. The patterned photo-resists are eliminated. The quartz wafer formed between the Cr film and the Al film is etched by using the dry etching process and the Al film is etched. The quartz wafer between the Cr films is wet-etched. The Cr films are eliminated.