APPARATUS FOR SUPPLYING PRECURSOR INTO VAPORIZER

摘要

PURPOSE: An apparatus for supplying a precursor to a vaporizer is provided to prevent a precursor in a supply line from being vaporized by providing a precursor the vaporizer in a state where a supply line remains in a vacuum condition. CONSTITUTION: A first supply line(100) supplies a precursor from a precursor supply(10) to a vaporizer. A first switching device(110) is located between the a precursor supply and the vaporizer. A second switching device(120) is located between the first switching device and the vaporizer. A controller(400) controls the opening or closing of first and second switching devices. A second supply line(200) injects a carrier gas from a carrier gas supply(40) into the precursor.