METHOD FOR FABRICATING ELECTRONIC DEVICE COMPRISING NANOWIRE

摘要

PURPOSE: A method for manufacturing an electric component is provided to simply manufacture a nano wire which floats while maintaining a unique electrical characteristic. CONSTITUTION: An organic or an inorganic thin layer(110) is formed on a substrate(100). A patterned nano wire(120) is expanded to the organic or the inorganic thin layer. A metal(130) is formed in both ends of the nano wire. A photo-resist(140) is formed on the metal. A floating nano wire is formed by etching the organic or the inorganic thin layer by using reaction gas or etchant. The reaction gas or the etchant selectively etches the organic or the inorganic thin layer only. The reaction gas is oxygen plasma gas.