| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of properly vibrating a resonator at a predetermined vibration frequency by non-contact heating holding means mounted to a predetermined mounting position of the resonator and holding an object. <P>SOLUTION: A resonator 7 comprises one resonator opening HOP formed at a mounting position of holding means 40, the other resonator opening HOP formed at a position different from one resonator opening HOP, and a resonator optical path HLP having one and other resonator openings HOP on both ends. Infrared lights of an infrared light source 14c of upper and lower mark recognition means 14 are radiated to a chip 23 or the holding means 40 via the resonator optical path HLP of the resonator 7, and so the chip 23 or the holding means 40 is non-contact heated. Therefore, the resonator 7 can be properly vibrated at a predetermined vibration frequency. <P>COPYRIGHT: (C)2012,JPO&INPIT |
