| 摘要 |
<p>Pumping installation for obtaining a high vacuum and pumping method using such an installation. Specifically, the invention relates to a pumping installation comprising: a chamber (5), first and second vacuum pumps (PAV1, PAV2), and a distribution circuit designed to continuously measure a first pressure (P1) at the inlet of the second vacuum pump (PAV2) and a second pressure (P2) in the chamber (5). If one of the pressures chosen from the first pressure (P1) and the second pressure (P2) is higher than a threshold pressure (Ps), a low vacuum is established with the action of the first vacuum pump (PAV1) alone, otherwise, a high vacuum is established with the first and second vacuum pumps (PAV1, PAV2) acting in series.</p> |
