| 摘要 |
<p>PURPOSE: A method for processing a nano-scale electrode in a biochemical analyzing chip is provided to form precise micro electrodes in micro channels by simultaneously processing a base material and a metal pattern using a femtosecond laser. CONSTITUTION: A method for processing a nano-scale electrode in a biochemical analyzing chip is as follows. Metal patterns(12,14,16) are formed in the surface of a first base material(10). The second base material is coupled to the top of the first base material with the metal patterns formed. The metal patterns and the base material are processed at the same time to form micro channels and micro electrodes.</p> |
