| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitive physical quantity detection device capable of suppressing the deterioration of accuracy in detecting a physical quantity, which is caused by warpage. <P>SOLUTION: A capacitive physical quantity detection device includes a sensor chip having: a capacitance part with a capacitance to be changed by the application of a physical amount; a processing part for processing the output signal of the capacitance part; and temperature detection parts for detecting a temperature. The temperature detection parts include: a first temperature detection element formed at a position where a center line, penetrating in the thickness direction of the sensor chip, passes the center of the sensor chip in the sensor chip; and a second temperature detection element formed at a position separated from the first temperature detection element by a prescribed distance. The capacitance part includes: a mobile electrode to be moved in a detection direction along an orthogonal direction; and a fixed electrode opposing to the mobile electrode in the detection direction. The processing part includes a correction circuit for calculating the warpage of the sensor chip, which is caused by heat, based on the output signal of the first temperature detection element and the output signal of the second temperature detection element, and correcting the output signal of the capacitance part on the basis of the calculated warpage. <P>COPYRIGHT: (C)2012,JPO&INPIT |
