发明名称 SHEET APPLICATION APPARATUS AND APPLICATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet application apparatus and a sheet application method which apply an adhesive sheet to even an adherend having a projecting part at an outer peripheral part without causing a clearance. <P>SOLUTION: A sheet application apparatus 1 includes sheet support means 6, 7 supporting an adhesive sheet MS disposed so as to face an adherend W, sheet deformation means 8A, 8B deforming the supported adhesive sheet MS toward the adherend W side and applying the adhesive sheet MS to the adherend W, and deformation restricting means 4A restricting an adhesive sheet region, which is located on the outer side of an outer periphery of the adherend W when the adherend W is viewed in a plan view, from deforming toward the adherend W side. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012089665(A) 申请公布日期 2012.05.10
申请号 JP20100234750 申请日期 2010.10.19
申请人 LINTEC CORP 发明人 TAKANO TAKESHI
分类号 H01L21/683;C09J5/00;C09J7/02 主分类号 H01L21/683
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