发明名称 VACUUM PROCESSING APPARATUS
摘要 A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.
申请公布号 US2012111668(A1) 申请公布日期 2012.05.10
申请号 US201213346381 申请日期 2012.01.09
申请人 SHINDO TAKEHIRO;TOKYO ELECTRON LIMITED 发明人 SHINDO TAKEHIRO
分类号 F16C33/66 主分类号 F16C33/66
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