发明名称 |
Control gate structure and method of forming a control gate structure |
摘要 |
Semiconductor devices and methods of fabricating the devices are provided. An example device may include a substrate and a gate structure on the substrate. The gate structure includes a control gate having at least three distinct gate regions. First and second control gate regions are configured as a first field type, such as a high-gate or low-gate type. A third control gate region configured as a second field type (different from the first field type) is at least partially disposed between the first and second control gate regions. |
申请公布号 |
US2012112256(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
US20100925991 |
申请日期 |
2010.11.04 |
申请人 |
TAN SHYUE SENG;LEUNG YING KEUNG;QUEK ELGIN;GLOBALFOUNDRIES SINGAPORE PTE, LTD. |
发明人 |
TAN SHYUE SENG;LEUNG YING KEUNG;QUEK ELGIN |
分类号 |
H01L29/68;H01L21/71 |
主分类号 |
H01L29/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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