发明名称 Control gate structure and method of forming a control gate structure
摘要 Semiconductor devices and methods of fabricating the devices are provided. An example device may include a substrate and a gate structure on the substrate. The gate structure includes a control gate having at least three distinct gate regions. First and second control gate regions are configured as a first field type, such as a high-gate or low-gate type. A third control gate region configured as a second field type (different from the first field type) is at least partially disposed between the first and second control gate regions.
申请公布号 US2012112256(A1) 申请公布日期 2012.05.10
申请号 US20100925991 申请日期 2010.11.04
申请人 TAN SHYUE SENG;LEUNG YING KEUNG;QUEK ELGIN;GLOBALFOUNDRIES SINGAPORE PTE, LTD. 发明人 TAN SHYUE SENG;LEUNG YING KEUNG;QUEK ELGIN
分类号 H01L29/68;H01L21/71 主分类号 H01L29/68
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