发明名称 |
MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS (MEMS) OPTICAL SENSOR ARRAY |
摘要 |
This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label- free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.
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申请公布号 |
CA2816374(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
CA20112816374 |
申请日期 |
2011.09.13 |
申请人 |
KOC UNIVERSITESI |
发明人 |
UREY, HAKAN;ALACA, BURHANETTIN ERDEM;TIMURDOGAN, ERMAN |
分类号 |
G01N29/02;G01N29/24 |
主分类号 |
G01N29/02 |
代理机构 |
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地址 |
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