METHOD FOR FORMING SMOOTH ULTRATHIN YBCO FILMS WITH HIGH CONDUCTIVITY

摘要

FIELD: electricity. ^ SUBSTANCE: invention is referred to laser evaporation of nanofilms with compound composition of metal oxide YBa2Cu3O7-x (YBCO) and with high conductivity; it can be used for development of nanoelectronic components. Nature of invention implies method for forming smooth ultrathin YBCO films with high conductivity at single-crystal substrate when by laser evaporation of YBa2Cu3O7-x target film is formed with thickness of L=57 nm with surface irregularity of öL=12 nm and specific resistance of ü=0.81.110-6 Ohmmetre; target is exposed to laser radiation with power density of P=31085108 W/cm2, wave length of =1.06 mcm, pulse width of ä= 10-20 ns and pulse repetition period of =10 Hz within time period of t=710 s at air pressure of p=50100 Pa and target temperature of T=600700C and substrate temperature of T=800840C. ^ EFFECT: invention provides formation of smooth ultrathin YBCO films at single-crystal substrate. ^ 10 dwg