发明名称 METHOD FOR CONTACT-FREE DETERMINATION OF LIFE SPAN FOR NON-EQUILIBRIUM CARRIERS IN SEMI-CONDUCTORS
摘要 FIELD: electricity. ^ SUBSTANCE: method uses differential optical arrangement in which beam of probing laser is divided into two beams; one beam passes through the specimen point where measurement is made while the other beam passes through the point located at distance from the first point and this distance is much bigger than diffusion distance of charge carriers. Thereafter two beams are gathered at one pint where photoreceiver is located. In result of refractivity variation nearby specimen point where measurements are made path difference between these beams is lost. Due to interference changes occur in rate of radiation received by photoreceiver. Life span of charge carriers is determined by computational method based on calculation of refractivity variation of radiation received by photoreceiver and substituting known parameters of shortwave injected radiation. ^ EFFECT: use of such arrangement allows increase of method sensitivity five times approximately. ^ 2 dwg
申请公布号 RU2450387(C1) 申请公布日期 2012.05.10
申请号 RU20100144277 申请日期 2010.10.28
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "SEVERO-ZAPADNYJ GOSUDARSTVENNYJ ZAOCHNYJ TEKHNICHESKIJ UNIVERSITET" (FGBOU VPO "SZTU") 发明人 FEDORTSOV ALEKSANDR BORISOVICH;IVANOV ALEKSEJ SERGEEVICH;CHURKIN JURIJ VALENTINOVICH;MANUKHOV VASILIJ VLADIMIROVICH;GONCHAR IGOR' VALER'EVICH
分类号 G01N21/41;H01L21/66 主分类号 G01N21/41
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