| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method of ultrasonic cleaning which reduce damage to an object to be cleaned due to cleaning liquid by irradiating ultrasonic wave on the whole surface of the object to be cleaned and shortening the cleaning time. <P>SOLUTION: A size of a vibration member to which an ultrasonic vibrator adheres is adjusted to a size of the object to be cleaned. At least two or more cleaning liquid supply openings are provided so as to face to a surface of the object to be cleaned in parallel and to be provided with minute clearances between them while flowing the cleaning liquid from cleaning liquid supply nozzles inserted to the cleaning liquid supply openings. While flowing the cleaning liquid on the whole surface of the object to be cleaned with almost uniform thickness, oscillation output is impressed to the ultrasonic vibrator from an oscillator. Ultrasonic wave is irradiated to the surface of the object to be cleaned, and the ultrasonic wave is spread on the whole surface of the object to be cleaned covered with the cleaning liquid. <P>COPYRIGHT: (C)2012,JPO&INPIT |
