| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign object detection device for detecting the size of a metal foreign object mixed in a specimen. <P>SOLUTION: There is provided a foreign object detection device which includes: placement means; first magnetism application means; first magnetism detection means; second magnetism application means; second magnetism detection means; and calculation means for measuring the size of a metal foreign object on a specimen. A first angle made by a first magnetism application direction and the placement means is different from a second angle made by a second magnetism application direction and the placement means. A first application distance between the first magnetism application means and the placement means when the first magnetism is applied is equal to a second application distance between the second magnetism application means and the placement means when the second magnetism is applied. A first detection distance between the first magnetism detection means and the placement means when the first specimen magnetism is detected is equal to a second detection distance between the second magnetism detection means and the placement means when the second specimen magnetism is detected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
