发明名称 |
SEMICONDUCTOR DEVICE HAVING DECREASED CONTACT RESISTANCE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A semiconductor device includes a first plug formed on a semiconductor substrate and exposed on side and upper surfaces of an upper part thereof and a second plug formed on the first plug to contact the exposed side and upper surfaces of the upper part of the first plug. |
申请公布号 |
US2012115320(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
US201213348864 |
申请日期 |
2012.01.12 |
申请人 |
YANG HEE JUNG;HYNIX SEMICONDUCTOR INC. |
发明人 |
YANG HEE JUNG |
分类号 |
H01L21/28;H01L21/768 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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