TEMPLATE PROCESSING METHOD, COMPUTER STORAGE MEDIUM, AND TEMPLATE PROCESSING DEVICE

摘要

The present invention pertains to a template processing method for coating a treatment fluid on a pattern region which is formed with a predetermined pattern on the surface of a template and for processing the pattern region. The method involves covering the pattern region with at least the coating surface of a treatment fluid coating tool for coating treatment fluid on the pattern region, arranging the treatment fluid coating tool so as to face the template such that the distance between the coating surface and the template region becomes a distance in which the treatment fluid produces a capillary effect, supplying the treatment fluid from the treatment fluid coating tool between the coating surface and the pattern region, and then diffusing the supplied treatment fluid only on the pattern region by means of the capillary effect.