METHOD AND FACILITY FOR SURFACE DENUDING OF INTEGRATED CIRCUIT

摘要

FIELD: electricity. ^ SUBSTANCE: method for surface denuding of integrated circuit by ablation of polymeric enclosure that covers integrated circuit initially; this method is characterised by combined action of laser beam and plasma on enclosure, at that combined action is carried out in the same enclosed space. Facility is also developed for implementation of this method. ^ EFFECT: method perfection. ^ 12 cl, 5 dwg