| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition which suppresses generation of particles in liquid even after a long-term storage, has excellent radiation sensitivity, has small temporal variation in characteristics such as a high backward contact angle in exposure, and has excellent storage stability. <P>SOLUTION: In the radiation-sensitive resin composition which contains [A] a fluorine-containing polymer having (f) a structural unit including a base-dissociable group, the content of water is 3 mass% or less. The base-dissociable group of the structural unit (f) preferably has a fluorine atom, and further preferably is an aromatic hydrocarbon group having the fluorine atom. <P>COPYRIGHT: (C)2012,JPO&INPIT |
