发明名称 |
IMAGE SENSOR HAVING GUARD RING AND NOISE BLOCKING AREA FOR BLOCKING NOISE AND METHOD FOR IMPLEMENTING THE IMAGE SENSOR |
摘要 |
PURPOSE: An image sensor having a deep guard ring and a noise blocking area for blocking noise in a back light accepting image sensor and a manufacturing method thereof are provided to efficiently eliminate crosstalk noise from a substrate since an ion implantation layer is separated by forming a noise prevention domain in a deep guard ring region of a photo diode. CONSTITUTION: An epi layer(202) is formed on a back side of an ion implantation layer(212). A well impurity layer(204) of a first type is formed on the epi layer. A well impurity layer(203) of a second type is formed in the rest area excluding the well impurity layer of the first type. A deep guard ring(206) is formed to be contacted with the well impurity layer of the first type and reach the back side of the ion implantation layer. An interlayer dielectric layer and a wiring are formed on the well impurity layer of the first type and the well impurity layer of the second type. |
申请公布号 |
KR20120046591(A) |
申请公布日期 |
2012.05.10 |
申请号 |
KR20100108327 |
申请日期 |
2010.11.02 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, KYUNG HO;AHN, JUNG CHAK |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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