| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprinting method which prevents the occurrence of transfer defects in the releasing of a mold and a resin layer, and an adherence agent and a transfer substrate enabling such an imprinting method. <P>SOLUTION: The imprinting method comprises a bonding layer-forming step of allowing the adherence agent containing a compound having, in one molecule, a tetravalent atom having one hydrolyzable group and two inert groups, and a reactive functional group bonded to the atom to contact with the substrate, then, by means of cleaning, forming the bonding layer on the substrate, and manufacturing the transfer substrate, a filling step of allowing the mold to go close to the transfer substrate so that a workpiece is interposed between the mold and the bonding layer, and filling the transfer shape section of the mold with the workpiece, a curing step of curing the workpiece, and a release step of pulling away the mold from the workpiece. <P>COPYRIGHT: (C)2012,JPO&INPIT |
