LIQUID EJECTION HEAD, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejection head having a liquid supply port into which a liquid can satisfactorily be flowed.

SOLUTION: The method for manufacturing the liquid ejection head includes a step (1) of forming an etching-proof mask 8 having an opening 9 corresponding to a liquid supply port 10 in a reverse surface of a substrate 1 having an energy generating element on a front surface side and a step (2) of forming the liquid supply port 10 by dry-etching of the substrate 1 using the etching-proof mask 8. In the method for manufacturing the liquid ejection head, the closer to the opening 9, the thinner regions around the opening 9 of the etching-proof mask 8 are in the step (1).

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