发明名称 ROTATION DEVICE, INSPECTION DEVICE, AND PROCESSING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a rotation device and the like that rotates a work-piece without causing an axis deviation. <P>SOLUTION: The rotation device 59 includes a rotation unit 11 having a roller 13 that rotates a work-piece 71 while contacting the surface of the work-piece 71; a spring 31 for pressing the rotation unit 11 to the work-piece 71; and an axis deviation prevention unit for preventing the axis deviation of the work-piece 71 caused by the pressure of the spring 31. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012088212(A) 申请公布日期 2012.05.10
申请号 JP20100236116 申请日期 2010.10.21
申请人 KANEKA CORP 发明人 TSUGAWA JO
分类号 G01N21/952 主分类号 G01N21/952
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