发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A technology is a semiconductor device and a method of manufacturing the same, capable of reducing capacitance with a storage node contact plug while maintaining a height and resistance of a bit line, by thickly forming a spacer between a bit line and the storage node contact plug. A semiconductor device includes a device isolation layer defining a plurality of active regions formed in a semiconductor substrate, a storage node contact hole exposing two neighboring active regions, a storage node contact plug material provided in the storage node contact hole, a bit line region that divides the storage node contact plug material into two parts and that has a convex portion at a lower portion of a sidewall, a spacer formed over a sidewall of the bit line region including the convex portion and a bit line formed in the bit line region.
申请公布号 US2012112269(A1) 申请公布日期 2012.05.10
申请号 US201113241110 申请日期 2011.09.22
申请人 KIM SUK MIN;HYNIX SEMICONDUCTOR INC. 发明人 KIM SUK MIN
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
代理机构 代理人
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