| 发明名称 |
RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the size of a storage and supply device for a wide variety of semiconductor gas at low pressure. <P>SOLUTION: An integral gas cabinet assembly includes a fluid storing and dispensing device including rectangular parallelepiped fluid storage and dispensing vessels 50, 52 and/or a ventilated gas purifier 61 in use in a ventilated gas cabinet 20. For example, when a processed gas supplied from the gas cabinet 20 is a toxic or hazardous character, the gas cabinet 20 can be enhanced in safety of operation by the use of physical adsorbent and chemical sorbent medium. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012087930(A) |
申请公布日期 |
2012.05.10 |
| 申请号 |
JP20110226626 |
申请日期 |
2011.10.14 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS INC |
发明人 |
BRESTOVANSKY DENNIS;WODJENSKI MICHAEL J;ARNO JOSE I;CARRUTHERS J DONALD;MOROCO PHILIP A |
| 分类号 |
F17C11/00;B01D;B01D53/02;B01D53/04;B01D59/26;B01J4/00;B01J4/02;B01J20/20;B01J20/28;B67D7/74;B67D99/00;F17C13/02;H01L21/205;H01L21/3065;H01L21/31 |
主分类号 |
F17C11/00 |
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