| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for preventing an uncured resist coated disk, positioned and placed on a lower stamper of a lower surface-side stamper device, from shifting in position when the lower surface-side stamper device moves, in a double-sided imprint device. <P>SOLUTION: The method includes the steps of: (a) positioning and placing the disk having both surfaces coated with uncured resist on an upper surface of a lower stamper mounted on the lower surface-side stamper device and having a fine transfer pattern; (b) partly irradiating at least a part, not corresponding to the fine transfer pattern of the stamper, of the resist present at a boundary surface between the lower stamper and the disk lower surface side with UV light; and (c) curing the resist at the UV-light irradiated part to temporarily and partly fix the disk to the upper surface of the lower stamper. <P>COPYRIGHT: (C)2012,JPO&INPIT |
