TOUCH FINGERPRINT SENSOR USING 1-3 PIEZO COMPOSITES AND ACOUSTIC IMPEDIOGRAPHY PRINCIPLE

摘要

Provided herein is a method of making an integrated circuit device using copper metallization on 1-3 PZT composite. The method includes providing an overlay of electroplated immersion of gold (Au) to cover copper metal traces, the overlay preventing oxidation on 1 :3 PZT composite with material. Also included is the formation of immersion Au nickel electrodes on the 1-3 PZT composite to achieve pad metallization for external connections.