| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heating apparatus capable of uniformizing the temperature in planer direction of an object by a simple method. <P>SOLUTION: The heating apparatus 200 includes a plate-like member 2 in which an object is arranged on a surface 2S, four heating elements 3A-3D which are arranged along the surface 2S to heat the object, power supply means connected to the four heating elements 3A-3D, connection state changing means which changes the connection state of any or a plurality of the four heating elements 3A-3D between thereof respectively to serial connection or parallel connection, and temperature detecting means 8 which detects a temperature of the any or the plurality of the four heating elements 3A-3D. The connection state changing means, based on the temperature of the heating elements 3A-3D detected by the temperature detecting means 8, changes the connection state of the any or the plurality of the four heating elements 3A-3D to serial connection or parallel connection respectively so that the heating amount applied on the object becomes uniform in the planer direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
