发明名称
摘要 This invention relates to methods for the production of micro-structured substrates and their application in natural sciences and technology, in particular in semiconductor, microfluidic and analysis devices. It concerns a method of introducing a structure, such as a hole or cavity or channel or well or recess or a structural change by providing a controlled electrical discharge.
申请公布号 JP2012510721(A) 申请公布日期 2012.05.10
申请号 JP20110538893 申请日期 2009.12.02
申请人 发明人
分类号 H01L21/306;H01L21/3065 主分类号 H01L21/306
代理机构 代理人
主权项
地址