| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide heat treatment equipment equipped with a horizontal rotation type heat treatment furnace capable of suppressing an increase in equipment cost and running cost with no possibility of the flow-out of a heating medium from a heating chamber nor the flow of outside air into the heating chamber. <P>SOLUTION: The heat treatment equipment equipped with the horizontal rotation type heat treatment furnace 1 includes an inner pipe 10 that rotates around the axis and an outer pipe 20 which does not rotate and is installed concentrically is the inner pipe 10 with a predetermined interval. Heating chambers R1 and R2 are provided between the inner pipe 10 and the outer pipe 20. Both ends of them extend from the outer pipe 20 to be closed with a pair of side walls 21 and 22 extending to the outer peripheral surface of the inner pipe 10. An object C1 is thermally treated with heating mediums H1 and H2 which are made to communicate with the heating chambers R1 and R2. Here, inner pressure at both ends of the heating chambers is identical with outer pressure outside the heating chambers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
