THERMAL CONTROL METHOD AND SYSTEM FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a system and method for controlling the temperature of a process tool.

SOLUTION: The system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with a compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

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