| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pulling-down apparatus which allows improvement of temperature distribution in a horizontal plane of a meniscus formation region and suitable observation of a meniscus. <P>SOLUTION: In the pulling-down apparatus, an after heater 13 is composed of a laminate comprising a first annular member 13a formed from an electroconductive material and a second annular member 13b formed from a light-transmissive material, wherein the second annular member 13b is used as a first observation window. Vertical slits 15a as second observation windows are arranged in a cylindrical outer ring 15 for heat insulation so as to be point-symmetrical with respect to a pulling-down axis. Thereafter, the outer ring 15 is rotated around the center of the pulling-down axis, and the meniscus is observed with an imaging means at such a state that the first observation window and the second observation windows are aligned in a row. <P>COPYRIGHT: (C)2012,JPO&INPIT |
