| 摘要 |
The present invention relates to a method for processing a nano fine electrode within a biochemical analysis chip. More particularly, a metal pattern is formed within a mother material, and then the mother material and the metal pattern are processed at the same time using a femtosecond laser to precisely and finely form a fine electrode in a fine channel. Also, only the metal pattern is additionally processed through a femtosecond laser nano surface processing method to obtain a more precise metal pattern on a nano scale level. As a result, a nano scale fine electrode having a size less than about 100 nanometers may be obtained. Also, accuracy of a nanometer level between the fine electrode and the fine channel may be secured, and the processing process may be simplified. |
