发明名称 INTEGRATED ELECTROSTATIC DISCHARGE (ESD) DEVICE
摘要 A method for making a semiconductor device includes providing a substrate of a first conductivity type and having a surface region, forming a well region of a second conductivity type and having a first depth in the substrate, adding a gate dielectric layer overlying the surface region, adding a gate layer overlying the gate dielectric layer, forming a first LDD region of the first conductivity type and having a second depth within the well region, forming an emitter region of the second conductivity type within the first LDD region, and forming a second LDD region of the first conductivity type with the well region, a channel region separates the first and second LDD regions. The method further includes forming a source region being of the first conductivity type within the second LDD region and adding an output pad coupled to both the drain and emitter regions.
申请公布号 US2012115282(A1) 申请公布日期 2012.05.10
申请号 US201113291093 申请日期 2011.11.07
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 LIU CHI KANG;YU TA LEE;LI QUAN
分类号 H01L21/331 主分类号 H01L21/331
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