发明名称 |
Optical Fiber Pressure Sensor With Uniform Diaphragm And Method Of Fabricating Same |
摘要 |
An optical fiber sensor (100) can be used to measure pressure with high sensitivity and fine resolution. As a (108) at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm (110) to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness. |
申请公布号 |
US2012116255(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
US201013381256 |
申请日期 |
2010.06.29 |
申请人 |
WANG WENHUI;WANG XINGWEI VIVIAN;SUN KAI;WU NAN |
发明人 |
WANG WENHUI;WANG XINGWEI VIVIAN;SUN KAI;WU NAN |
分类号 |
A61B5/103;B32B37/02;B32B37/06;B32B37/14;B32B38/04;G01B9/02;G02B6/00 |
主分类号 |
A61B5/103 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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