发明名称 |
Method for producing silicon layers |
摘要 |
<p>The invention relates to a liquid-phase method for the thermal production of silicon layers on a substrate, wherein at least one higher silicon that can be produced from at least one hydridosilane of the generic formula SiH(with a = 3–10) being applied to a substrate and then being thermally converted to a layer that substantially consists of silicon, the thermal conversion of the higher silane proceeding at a temperature of 500–900 °C and a conversion time of≤5 minutes. The invention also relates to silicon layers producible according to said method and to their use.</p> |
申请公布号 |
AU2010321034(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
AU20100321034 |
申请日期 |
2010.11.10 |
申请人 |
EVONIK DEGUSSA GMBH |
发明人 |
WIEBER, STEPHAN;PATZ, MATTHIAS;CARIUS, REINHARD;BRONGER, TORSTEN;COLLE, MICHAEL |
分类号 |
C23C18/14;C23C18/12;H01L21/02 |
主分类号 |
C23C18/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|