发明名称 |
ALKALINE ETCHING LIQUID FOR TEXTURING A SILICON WAFER SURFACE |
摘要 |
An etching liquid for texturing a silicon wafer surface is provided. The etching liquid may include an aqueous solution of at least one alkaline etching agent and at least one polysaccharide or derivative thereof. Also provided is a process for texture etching a silicon wafer using the etching liquid of the invention.
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申请公布号 |
US2012112321(A1) |
申请公布日期 |
2012.05.10 |
申请号 |
US20100939193 |
申请日期 |
2010.11.04 |
申请人 |
HOLDERMANN KONSTANTIN;SOLARWORLD INDUSTRIES AMERICA, INC. |
发明人 |
HOLDERMANN KONSTANTIN |
分类号 |
H01L29/30;C09K13/00;C09K13/02;H01L21/306 |
主分类号 |
H01L29/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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