| 发明名称 |
SAMPLING DEVICE |
| 摘要 |
<p>Disclosed is a reliable microsampling means in a sampling device having an observation system using charged particles exemplified by an electron microscope. The disclosed sampling device is provided with a substrate for mounting a microsample, a probe for moving the microsample, and an electron beam irradiation means for charging the microsample.</p> |
| 申请公布号 |
WO2012060056(A1) |
申请公布日期 |
2012.05.10 |
| 申请号 |
WO2011JP05751 |
申请日期 |
2011.10.14 |
| 申请人 |
JP;JP;JP;JP |
发明人 |
AKAMATSU, NAOTOSHI;IWANAMI, TAKASHI;HORIKOSHI, KAZUHIKO |
| 分类号 |
G01N1/00;B25J7/00;G01N1/28;H01J37/20;H01J37/28 |
主分类号 |
G01N1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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