REAL-TIME ANALYSIS SYSTEM FOR PROFILING THE ELEMENTAL COMPONENTS OF CIGS THIN FILM USING LASER-INDUCED BREAKDOWN SPECTROSCOPY

摘要

PURPOSE: A real-time analysis system for profiling the elemental components of a CIGS(Copper Indium Gallium Selenide) thin film using laser-induced breakdown spectroscopy is provided to rapidly and precisely measure the chemical and physical characteristics of a CIGS thin film by measuring material distribution within the CIGS thin film in real time in a continued manufacturing line of a CIGS thin film solar cell. CONSTITUTION: A header(100) detects the spectrum of plasma generated from a CIGS thin film(5). The header is composed of a laser irradiation unit and a spectrum detection optical unit(20). A header transport unit(200) transfers the header wile being connecting with the transfer of the CIGS thin film. A spectrum analysis unit(300) analyzes spectrum information delivered from the header. The spectrum analysis unit detects the abnormality of chemical and physical distribution of a material comprising the CIGS thin film.