发明名称 PHOTOSENSITIVE RESIN COMPOSITION FOR RESIST MATERIAL, AND PHOTOSENSITIVE RESIN LAMINATE
摘要 <p>Disclosed is a photosensitive resin composition for a resist material, which contains (A) 30-70% by mass of an alkali-soluble polymer, (B) 20-60% by mass of a compound that has an ethylenically unsaturated double bond, and (C) 0.1-20% by mass of a photopolymerization initiator. The photosensitive resin composition contains, as (B) the compound that has an ethylenically unsaturated double bond, (B-1) a compound that has at least a hydroxyl group, a phenyl group and two or more ethylenically unsaturated double bonds in each molecule, and (B-2) a compound that has an ethylene oxide group and a (meth)acryloyl group in each molecule.</p>
申请公布号 KR20120046781(A) 申请公布日期 2012.05.10
申请号 KR20127007501 申请日期 2010.09.24
申请人 ASAHI KASEI E-MATERIALS CORPORATION 发明人 TSUTSUI YAMATO
分类号 G03F7/027;G03F7/004;H01L21/027 主分类号 G03F7/027
代理机构 代理人
主权项
地址