| 摘要 |
A method of forming a vertical interconnect for a memory device. The method includes providing a substrate having a surface region and defining a cell region, a first peripheral region, and a second peripheral region. A first thickness of dielectric material is formed overlying the surface region. A first bottom wiring structure spatially configured to extend in a first direction is formed overlying the first dielectric material for a first array of devices. A second thickness of a dielectric material is formed overlying the first wiring structure. The method includes forming an opening region in the first peripheral region. The opening region is configured to extend in a portion of at least the first thickness of dielectric material and the second thickness of dielectric material to expose a portion of the first wiring structure and to expose a portion of the substrate. A second bottom wiring material is formed overlying the second thickness of dielectric material and filling the opening region to form a vertical interconnect structure in the first peripheral region. A second bottom wiring structure is formed from the second wiring material for a second array of devices. The second bottom wiring structure is separated from the first bottom wiring structure by at least the second thickness of dielectric material and spatially configured to extend in the first direction. The first wiring structure and the second wiring structure are electrically connected by the vertical interconnect structure in the first peripheral region to a control circuitry on the substrate.
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