| 摘要 |
The present invention discloses a line-width inspection device. The line-width inspection device has a platform, an image capturing device, a main light source device and at least one compensation light source device. The image capturing device is mounted above the platform, aligned with an inspection area of the platform and captures images of a pattern under inspection in the inspection area. The main light source device is disposed above the platform and correspondingly provides forward illumination to the inspection area, and an incident direction thereof is perpendicular to the platform. The at least one compensation light source device is mounted above the platform and provides compensation illumination to the inspection area. The additional compensation light source device can prevent edges of the pattern under inspection from occurring shadows and affecting image capturing, so as to enhance precision of image capturing.
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