| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain a liquid supply pump capable of delivering a constant amount of liquid. <P>SOLUTION: The liquid supply pump 1 includes: a first liquid chamber 70, a second liquid chamber 80 and a third liquid chamber 90 disposed in series by dividing a space between an inlet channel 19a, into which liquid is supplied, and an outlet channel 13, from which liquid is delivered, into three; a first movable partition 31 and a second movable partition 41 which section the respective liquid chambers and change the volume of each of the respective liquid chambers; a cam mechanism 110 alternately reciprocating the two movable partitions between the inlet channel 19a side and the outlet channel 13 side; a motor 170 giving driving force to the cam mechanism 110; channels 32, 33 respectively opened in the first movable partition 31 and the second movable partition 41 and providing communication between the adjoining liquid chambers; and check valves 36, 37, 38, 39 opening and closing the channels 42, 43. The check valves are closed when each movable partition is moved from the inlet channel 19a side to the outlet channel 13 side, and the check valves are opened when each movable partition is moved from the outlet channel 13 side to the inlet channel 19a side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
