FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES
摘要
Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.
申请公布号
WO2012059251(A2)
申请公布日期
2012.05.10
申请号
WO2011EP64085
申请日期
2011.08.16
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;WAGGONER, PHILIP, SUTTON;HARRER, STEFAN;ROSSNAGEL, STEPHEN
发明人
WAGGONER, PHILIP, SUTTON;HARRER, STEFAN;ROSSNAGEL, STEPHEN