Method for manufacturing e.g. nitrogen oxide sensor for internal combustion engine, involves successively coating material layers on walls of through-holes, where material for each through-hole is suspended and dried in each step

摘要

The method involves laminating ceramic films (11-13) to form a horizontal layered structure. The through-holes (14,15) are formed in the ceramic film (12) and material layers having different functional properties are coated successively on the walls of through-holes to form a vertical layered structure, where the material for each through-hole is suspended and the ceramic film (12) is dried in each coating step. An independent claim is included for ceramic composite element.